JPS6447036U - - Google Patents
Info
- Publication number
- JPS6447036U JPS6447036U JP14069787U JP14069787U JPS6447036U JP S6447036 U JPS6447036 U JP S6447036U JP 14069787 U JP14069787 U JP 14069787U JP 14069787 U JP14069787 U JP 14069787U JP S6447036 U JPS6447036 U JP S6447036U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust chamber
- process tube
- gas
- reaction
- gas inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 3
- 239000012495 reaction gas Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14069787U JPS6447036U (en]) | 1987-09-14 | 1987-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14069787U JPS6447036U (en]) | 1987-09-14 | 1987-09-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6447036U true JPS6447036U (en]) | 1989-03-23 |
Family
ID=31405105
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14069787U Pending JPS6447036U (en]) | 1987-09-14 | 1987-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6447036U (en]) |
-
1987
- 1987-09-14 JP JP14069787U patent/JPS6447036U/ja active Pending